FLOOD EXPOSURE SOURCES
BEAM HOMOGENIZER ABSORPTIVE HEAT SINK 45 DICHROIC MIRROR ELLIPSOIDAL REFLECTOR LAMP COLLIMATING LENS SHUTTER

45 MIRROR

Fig. 1 Optical configuration of Flood Exposure Source.
Each source is made up of three components: the illuminator housing, lamp and a power supply.
W Mercury Flood Exposure Source.

s s s s

High intensity output Highly uniform, large, collimated beam Efficient out of band rejection Timed exposures
SUPERIOR COLLIMATION AND BEAM UNIFORMITY
These sources are known for their superior collimation and beam uniformity. The divergence at the work plane depends on the illuminated integrator size and the focal length of the collimating lens. The divergence ranges from 1.4 to 6.6. We list specific values in Table 1 on the following page. Beam uniformity is 5%.
THREE SPECTRAL RANGES AVAILABLE
These sources use either a mercury or mercury(xenon) lamp which have the output spectra shown on pages 1-49 to 1-50. The dichroic mirror modifies the output to determine the source spectra. We offer three wavelength ranges:
350 - 450 nm, designed to expose most of the available photosensitive materials 260 - 320 nm, for polymer cross linking and novel resist materials 220 - 260 nm, for deep ultraviolet studies
Tel 2033778282 Fax 2033782457 E-Mail res_sales@oriel.com URL www.oriel.com

Fiber Optics

Instruments
Power Supply This ultrastable power supply sends low level pulses to the ignitor; once the arc is established the power supply controls the lamp directly. Its efficient switching circuitry operates the lamp under extremely tight current control. This results in low ripple and high line voltage regulation.

Detection Equipment

These pages describe our 350, 500 and 1000 W Flood Exposure Sources for the NUV (350-450 nm) and DUV (220-260 nm and 260-320 nm). With a collimated output beam up to 10 x 10 inches (254 x 254 mm), you can irradiate large samples or multiple samples simultaneously. The output of the 1000 W model can be rotated 90 to produce a horizontal beam. A variety of filters and dichroics, some standard and some custom, are offered for these illuminators. Whether your spectral output requirement is narrowband or broadband, from the DUV to IR, we have a wide variety from which to choose.
Lamp The lamp is a 350 W Hg, 500 W Hg, 500 W Hg(Xe) or 1000 W Hg(Xe) short arc lamp, depending upon the source you choose.

FT-IR Spectrometers

Illuminator Housing Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector collects up to 70% of the lamp output and directs it to a NUV or DUV dichroic reflector for spectral selection. The optical integrator scrambles the light and produces many diverging beams. These diverging beams overlap at the collimating lens to produce a uniform, collimated beam at the work plane. An electronic splitblade shutter lets you time exposures. An ignitor, required to send the high voltage ignition pulses to the arc lamp, is positioned close to the lamp to reduce the pathlength the pulse must travel; this facilitates ignition and reduces EMI. The housing is also equipped with an interlock system for the safety of the operator. A temperature controlled fan provides air cooling to ensure optimum lamp, optics and housing temperature.
Monochromators & Spectrographs

Lasers

WHAT MAKES UP A FLOOD EXPOSURE SOURCE?

Photolithography

Light Sources

200 180

SPECTRAL IRRADIANCE (W cm-2 nm-1) at 50 cm Distance

0.0 200

SPECTRAL IRRADIANCE -2 -1 ( mW cm nm )

WAVELENGTH (nm)

Fig. 2 Typical output of W Hg Lamp.
Fig. 3 Output of 6285 Lamp, modified by a 350 - 450 nm dichroic. The dichroic does not remove all the out of band radiation, but substantially reduces it.

SPECIFICATIONS

Beam Size inch (mm) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 10.0 x 10.0 (254 x 254) Collimation Angle ( Degrees) 4.6 2.6 1.8 1.4 4.6 2.6 1.8 1.4 4.6 2.6 1.8 1.4 6.6 3.8 2.5 2.0 1.6 Working Distance inch (mm) 2 (51) 3 (76) 4 (101) 5.5 (140) 2 (51) 3 (76) 4 (101) 5.5 (140) 2 (51) 3 (76) 4 (101) 5.5 (140) 2 (51) 3 (76) 4 (101) 5.5 (140) 7 (178) 220 - 260 nm Flux Density Model (W m-2) No. Spectral Region 260 - 320 nm Flux Density Model (W m-2) No. 350 - 450 nm Flux Density Model (W m-2) No. 87436 87437

Lamp Type 350 W Hg

500 W Hg

500 W Hg(Xe)

1000 W Hg(Xe)
Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response. Beam Uniformity: 5% over the specified area. This is measured at a plane at the recommended working distance from the collimating lens. Uniformity will degrade somewhat at other distances.

FOR A QUOTATION.

Contact our A.E.G. Sales Department for a quotation on these systems.
Contact us for further information on any of the products in this catalog