1.50065E+11 New Used Used Used Used Used Used Used Used Used Used New New Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used New Used Used Used Used New Used New Used Used Used Used Used Used Used Used

99X0700110-1

4173076

C550419

D37272800

3361 3362

Servo Drive Servo Drive RF Generator Heater Baratron PCB, Comm Board Clamp Chuck Electrode Electrode Clamp Ring Baffle Plate Hot Edge Plate Ring Focus Clamp Ring Insul. Ring Insul. Ring Ring Focus Showerhead Ring Focus Top Chamber Cover Insul. Ring Insul. Ring Electrode Endpoint Controller Cover Blank Laser Air Purifier RF Monitor Monitor Network Module Interface Module Programmable Cont. Heat Chamber Gate Valve Control Tank Control Test Wafer Monochromator Pneumatic Hoist Power Supply Door Assembly Lid Flange AC Window Assm Anti-cloud assembly AC Window Cont. Scan Amplifier RF Amplifier RF Amplifier Adapter Unit Turbopump Cont. Dryvac Controller
Panasonic Panasonic Comdel SMC MKS LAM LAM LAM Lynn LAM LAM LAM LAM LAM Integrated Cir. Supp. LAM LAM LAM AceCo LAM LAM LAM LAM Lynn Luxtron LAM Spectra-Physics AMAT Data Instruments Edwards Edwards Mitsubishi JEOL AMAT Semitool SensArray Luxtron Lam

CX-1250S Thermo-Con

magnet chamber
MQDB042AAD MQDB022AAD FP3212RC INR-244-602A Pressure Switch 41A 28-8875-027 716-011651-006 716-140126-100 L147-G263SFG 715-011626-001 715-140287-002 715-011902-001 716-140427-001 716-330190-081 ICS-715-011535-1 716-330915-001 716-140069-001 716-030135-001 CS33-333 716-330190-081 715-330773-001 716-140069-001 716-140069-001 L147-587513NC 1014 713-021816-001 2200A 0220-03190 AD824 D37215000 A52844460 AY51-UL WS-7555FEGH/IP 0010-2030B-0027 Model lam alliance HC24-2.4-A+ A0240-00598 0090-00044 0090-00045 F5260001 MCS 1600-3CI MCS 2600-3C-I*-UC HPC-20 CDG STC-G 200.80.513
Used Used Used Used New Used New New New New New New New New New New New New New New New New New New Used Used Used Used Used New Used Used Used Used Used Used Used Used New New New Used Used Used Used Used Used Used Used Used
2 (lots of 10) Condor 2 TEL AMAT AMAT AMAT AMAT Varian Verteq Verteq Tylan Seiko Seiki Leybold
5000 Etch 5000 Etch 5000 Etch

M 100S

3718 3726
PCB, Chopper Driver Flash Module Test Wafer PIN DC Power Supply Heater MDX Power Supply Heat Exchange Motor Photoelectric Sensor Profilometer Butterfly Valve LF RF Generator Light Curtain Pair Pendulum Valve Servo Drive Servo Drive Throttle Valve Throttle Valve Throttle Valve Throttle Valve Throttle Valve Chiller Turbopump Cont. Turbopump Cont. Pneumatic Manifold Power Supply Load Port Chlorine Ring Cathode Electrode, Upper Microscan II Power Coherent Laser Control Rack Photomask meas. Interface Module Pump Silencer TMS Unit Laser Post. Sys. Liquid N2 Controller Pump Controller Gate Valve Photoresist Pump Photo Resist Pump Photo Resist Pump Interface Control Module Chemical Tanks Turbopump Cont. Turbopump Cont. Turbopump Cont. Turbopump Cont. Turbopump Cont. Turbopump Cont.

PDX 1250 CX-1250S Quanta-10D-01 MDX L6 Turbotronik
EI-3203MD Hivolt Series 1000 STP-A2503PV

IPUP IPUP

MQDB015A1D01 SS5Y3-ULB980182 SS5Y3-ULB990074 SS5Y3-ULB990057 PAC-6E 253B-16083 683B-21940 SGDS-50A72A SGDH-01AE-NS310 SGDS-02A72A SGDH-01AE-Y902 SGDA-02ASY134 SGDA-02AS SGDH-01AE-Y901 3156024-131A FP3212RB Quanta-10 3152317-000 CP 6200 NT 340 M QDP-80 506A2 ET 600W Diode EI-3203MD-A1 SS3Y1-ULB990023 A1018860 SCU-A2503PV TIM-120 3155031-014 712-602704 A100L ADP 100L W5Q11-ULB990069 Model 356 7200-2696, Rev P7 7201-2620 Rev PADP220 8030EKR2-H-LM PV1A015SM61P50DB1 8030DR2-HLM 1004635 MN3150202-000 ESE RT107-1201-002 APC-001-P.2 30C61E-B014 MDQB012AAD02 PRE-301B

418, 140 49215, 71461

961438

0000044020

Used New Used New Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used New Used Used Used Used Used Used Used
103304-0603-0001 Used 2145-1202-0001 Used Used Used Used Used Used Used Used Used New Used Used Used Used

FL 2000 Remote

D37272000
Network Module Interface Track Wafer Holding Assy Gauge Controller Robot Controller Robot Interface Track Vacuum Pump Interface Module Turbopump Pneumatic Manifold Programmable Cont. Heat Exchange Motor Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Servo Drive Prealigner Vacuum Pump Chiller Remote Plasma Vacuum Pump Pneumatic Manifold Teach Pendant Vacuum Pump Controller Computer RF Match Pneumatic Manifold Power Supply Electron Controller Angle Valve Dual slit valve Dual slit valve Robot Robot Vacuum Pump MFC MFC MFC Chamber seal Filler ring

7(lot) 1 1

AMAT SVG TEL Granville-Phillips MECS Equipe PRI SVG Edwards Edwards Varian SMC Koyo Grundfos Sanyo Denki Sanyo Denki Sanyo Denki Sanyo Denki Sanyo Denki Sanyo Denki Sanyo Denki Samsung Yaskawa Sanyo Denki Sanyo Denki Sanyo Denki Equipe PRI Alcatel Neslab AE Alcatel SMC Millipore Edwards Hitachi AMAT SMC Lambda TEL MDC VAT VAT Newport Newport Alcatel STEC Tylan STEC Lam Lam

Series 90 S

Turbo-V 1800

BL BL BL BL BL BL BL

Super Super Super Super Super Super Super

PV PV PV PV PV PV PV

BL Super PV BL Super PV BL Super PV IPUP DI Max ADP 31 W2501KP01 Remote M-308ATE PC Sub-Zero RF Match NP420-DN1 ECC2 Controller 313029
9090-ACS-7000 ATM-IQDP80 UW5Q11-ULB990232 Direct Logic 205 MG 112MB2-28FT130-C PV1A015SFYNP50 PV1A015SM51P50 PV1A015SMT1P50 PV1A015M61P50 PV2A015SM61P50 PV1A015M61P50 PV2A015SMT1P50-1 CSDJ-A5CX1 SDGA-01APPY126 PV1A015SM61P50B1 PV1A030SGDNP50 PV2B050SXX1AZ0 PRE-301B-CE A100L DEI Water to Water Cooler 3151802-003D ADP 31 M1 VV5Q11-ULB990068 Photo-250 iQDP 710-S00242A 0010-02977 B10212004-42523 VA-26685 3D80-000766-V1 AV-150M-P 0210X-CA15-3701-1425-25 15-3702-1425-25 A100L SEC-4600M 2900 Series SET-4550 515-021101-001 716-011036-001

General Scanning P-8 wafer prober
1103P-000056 P-8I PRE-301B-CG-CE-S2

SVG 90S MicroMaster

Datawave STI-107 Pair
Lower Octopole/Wein Lens Lower Octopole/Wein Lens
Pentagon Tech Pentagon Tech Pentagon Tech
Quantum Magnet Assembly Includes Dual Relay PCB - 8200032-00 in excellent condition
PRE-300B-CE LQ10D367 ATM-407B-2-S-CE-S293 ATM-9288 WP6211-AA-AA NSR-S202A various CAC050C4 P5000 Mark II 262-78549-20V1, 262-78462-56V1 8666, 21196, ATM-104-1 21198, ATM-4858 780-14108-000 780-14108-000 100SV3000SM41B3 44-4660SRE-101 64-3242KLR20 64-26V2TRL21 23-BA25AHH-16 52-0912 720-12647-002 WZ10-101351-21 X6 WZ10-101268-11 X1 WZ10-202201-11 X3 WZ10-102693-11 X1 WZ10-102397-11 X1 0040-61580-003 VAR1956 760-321399-000 720-01488-003
PI01404 PRE-10137, PRE11514 PRE-9467
Fiber-Lite - Dolan-Jenner Indust. 0027106-002 A-241P-RS-232 0055993-000 720-480036-002 Tropel 1X 29-0259 52-0837

7309 7310

Left Cassette Nest, 5.2, ASMIF X-Scanner Assy AMS Assy Camera, TDI, Multi-Surface Inspection AC Power System NGP, SP2 Mask Changer Assy Right Cassette Nest, 5.2, ASMIF Analyzer Assy Dog/Wag, SLX Assy Pol Assy, NNC, AIT3, XP SM00 Monochromator Assy, Reflected Light, SLX Low Mag AMS FRU Kit, Comet Power Supply M1 Active Mirror, 3XX-I Air Slit Assy, AIT2 Mask Changer Assy, AIT3 Mounted Assy, M1, L7, NNC, AIT3 Mounted Assy, L7, NNC, AIT3 X Motor, Field Upgrade Rotary Transfer Arm PCB, GSI Lumonics APS NIC Tower, AIT3XP. FRU Made PCB, PWA Nikon Box Door Opener Kit, Shipping, Assy, Rotate, Transfer Arm, O/S Reflected Light Assy, SLX Lamp, D2 HB, Hamamtsu #L9519-01 Aperture Rod Assy ES32, FRU Aperture Heated Rod, FRU Aperture Heated Rod, FRU Dual Aperture 5200 Assy Lens/Lower Octopole/Wein Pneumatic Box FRU Kit, Comet Thermoelect Chiller, Liq-Cooled W/Surge Cannon Box Magazine Assy Thermoelect Chiller, Liq-Cooled W/Surge Shuttle Handler Stage Assy Ellipsoid Collector, SP1, TBI LSR Servo Detector, AIT UV Mirror, 150mmX25mmX8mm, 50M Mask and Polarizer, NNC, AIT UV 4800Line Encoder Motor UCO, COL, SLX Assy MTG Rear Servo Valve CYL Telescope-1 Assy, AIT2 Resist Pump Controller FRU Kit, Y O/S Motor Assy Polarizer, COLL Side, AIT UV Mini Environment

pair 1 1

KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor Powertronix KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor KLA-Tencor Cybor KLA-Tencor KLA-Tencor KLA-Tencor

AE AE AE AE AE Leybold MKS AE Tektronix Brooks Nor-Cal AE AE Komatsu Brooks Osaka Vacuum Hitachi Hitachi Novellus KLA Tencor MECS MECS Equipe Equipe PRI Brooks Omron JDS Uniphase Sony Brooks PRI KLA-Tencor Omron Astec Omron AE Lam AE AE AE AMAT AE AE Comdel Comdel AE Unit STEC AE
PDX 900-2V Pinnacle 6kW RFDS 2000-2V RFDS 2000-2V
3156024-132A 3155031-037A 3152412-218G 3155038-013B 3155038-013C TW 300 UHV-40-ACC-EAVM 3152313-004B TDS680C PRE-300B-CE NC-95-PP 3152412-400C 3155083-108B AK-1000 ABM405-1-S-CE-S293 TH542, TH532ASAW S-9300 S-9300 DLCM-S 8020 UTVF2500H UTXF5000 ATM-107B-1-S-CE-S293 ABM-407B-2-S-CE-S293 FixLoad 25 Sysmac CQM1 2214-25MLUP DXC-950, CMA-D2 ATM-105-1-CE 18-009966 CQM1H-CPU21 LPS254 Sysmac CQM1 3152412-223E OEM-650A 3152412-223B 3152412-223E 3152412-223C various 3152012-043X 3152223-003Y CLX-2500 CLX-2500 3155083-180B UFC-1662 SEC-4500M 3151801-004A
282646 C109787, 121209 187768, 211151, 175094, 73064, 60994 B020320 PRE-641277, C0511-12093 H520-1069, 1234
Used Used Used Used Used Used Used Used New Used Used Used Used New Used Used Used Used Used Used Used Used Used Used New Used Used Used

MDX-L12-650

Pinnacle 20kW HFV 8000

2 pumps, 2 controllers

Concept Two Dual Altus AIT

97-46-5421 0700-8238

0405-10566

KLA-Tencor PowerHAD

ATM-10660, 18325, Used 24121, 25132 Used Used Used Used Used Used Used
18-023437 Pinnacle 20kW ENI Generator cart Pinnacle 20kW Pinnacle 20kW Pinnacle 20kW 233067390 MDX-10K Slave MDX-20K Master FP1336R3 FP1336R2 HFV 233520053

346207 278634

C572944, C572949 Used 308518, 272793 BF3, 5sccm O2, 10SLM 243203 Used Used Used Used Used Used Used Refurb Refurb Used
Robot Robot Robot Remote Plasma Printer Power Supply Power Supply PCB, Commutator PCB, Power Amp PCB, Interface HFV RF Generator MDX DC Power Supply MDX DC Power Supply RF Generator HFV RF Generator Driver Board Robot Robot RF Generator RF Generator RF Generator RF Generator RF Generator PDX RF Generator PDX RF Generator RF Generator RF Generator MDX DC Power Supply MDX DC Power Supply MDX DC Power Supply MDX DC Power Supply MDX DC Power Supply MDX DC Power Supply Driver Board Robot Robot Controller RF Generator Robot Set Robot Controller RF Generator Vacuum Pump Robot Controller RF Generator Robot Controller End Effector

1 1(lot) 1

Equipe Equipe Equipe AE Sony Tri-Mag Power-One SVG SVG SVG AE AE AE Comdel AE ASTeX Brooks Equipe PRI ENI ENI ENI Comdel Comdel AE AE ENI ENI AE AE AE AE AE AE ETO Kawasaki Kawasaki ENI MECS Kawasaki Comdel Edwards Kawasaki Comdel MECS Nikon

Mavigraph

HFV 8000 MDX-20K Master MDX-10K Slave FP1336R2 HFV 8000
ATM-407 ABM-407B-2-S-CE-S293 ABM-407B-2-S-CE-S293 3151801-004A UP-5500 TPYA45-4SF HPF5A2B1A1P6-5549/VAD557 A 859-8368-003 859-8369-008 879-8010-002 3155083-109B 3152223-003 3152012-043Z CLX-2500 3155083-109A ABX-X355 6-0000-2836-PC ATM-407B-1-S OEM-12B-02 GMW-25Z GHW-12Z CX-1250S CX-1250S 3156024-105C 3156024-105C OEM-28B DPG-10 3152223-003F 3152012-041AC 3152012-043F 3152011-035F 3102011-035H 3152012-041AA ABX-X279 3NS410B-D501 C61D-A002 OEM-12B3-02 various 30C61E-B003 CX-1250S iH 35SE C61C-A002 CX-1250S UTV-2500H 2K111-421

188764 13730253

VHP bearing kit
with light pen AMAT Centura S204 300mm
Centura 300mm Centura 300mm Centura 300mm 300mm BP Mirror 110MM ASML S205, S306, S204 Scanner ASML AX8200

096, 136

Nikon S306 scanner FP1336R9000
13360084 9000-1106-0408 9000-0704-0308
Used 0809-10128, 0805Refurb 10647
Load Port Chiller Chiller Chiller Microscope Vacuum Pump Heat Exchanger Vacuum Pump Vacuum Pump Gate Valve Scroll Pump Scroll Pump Turbopump Cont. Pressure Controller Scrubber Turbopump Pendulum Valve Profilometer RF Generator Turbopump Wafer Transfer Robot Track Profilometer Teach Pendant Prealigner Mirror, BMU Cylinder, Stroke MH RPF concave End Effector Mask Ring MH RPF concave 7.2% Shield, etch Shield, PVD Shutter Disk PCB, Drive Bell Jar Robot Controller Gate Valve Load Port Robot Prealigner Gate Valve Robot Power Supply Robot Controller
Asyst Neslab Neslab Thermo Neslab Leitz Edwards Komatsu Edwards Edwards HVA Varian Varian Seiko Seiki Nor-Cal Cleansorb Osaka Vacuum VAT NanoMetrics ENI Edwards ASQ MECS NanoMetrics MECS MECS Nikon Oerlikon Nikon Oerlikon Oerlikon Nikon Oerlikon Oerlikon AMAT Nikon AMAT MECS VAT Brooks Equipe PRI MECS VAT Kensington HiTek Power Kensington
9700-5384-11 MX 500 MX 500
Versaport STD AMP MX+500W D3 Neslab III MX-500W D3 Ergolux QDP80/QMB250 AKX-3000-V iQDP80 iQDP80 21251-1003Z-001 PTS03001UNIV PTS03001UNIV STP-A1603C APC-001-P.2 CS195SC TS443BW-40 65044-PH52-AJD1 NanoSpec B-5002 STP-XH3203P AT2S8-25 YCSB-700 AL100 4L992-195AN 102078752 4G680-388BN 4G680-431AN 0021-17725 2S003-056 0040-13509 CS-7000 12046-PE24-AAF1 FixLoad 25 ABM-405 AL100 10846-XE28-AAX2
09-2305-55791, 09-1408-972145721, 066401418, 066408560 066401418, 066408560 LPC80230 LPC1507, 1508
Refurb Used Used Used Used Used New New New Refurb Used Used Used Used Used Used Used New Refurb Used Used Used New Used Used New New New New New New New New Refurb Used New Used New New Used Used Used Used Used Used

9000 Spectrum

C122, C98X070920-1 985070240-1, 993071450-1 98X071130-1
P1264 BSM 200mm scanner Unaxis 300mm 200mm scanner

UTX-5000

98X070910-1, 98X071410-1 0407-10701 98Z070130-1 00-501-29T SMP

A1028760

1140-00161 25-0000-0016-00

02-102-63

RF Generator Laser Valve Island Servo Drive Gate Valve Power Supply Remote Plasma RF Generator Robot LF RF Generator High Volt Cable Turbopump Robot Controller RF Generator Frequency Inverter Robot Controller Prealigner Robot Robot RFDS RF Generator Microwave Gen. Heat Exchanger Gauge Controller RF5S RF Generator Compressor LF RF Generator Servo Drive
ENI Vistec Norgren Yaskawa Nor-Cal Vicor ASTeX ENI Kawasaki AE Varian Varian Genmark Comdel AC Tech Genmark Equipe PRI Genmark Staubli AE Daihen SMC Granville-Phillips AE CryoTiger AE Kollmorgen RF5S
GHW-12Z 020-654.037-000 VM1516SLU0238A SGDA-02AS 021010-1 MM4-14581 ASTRONi GMW-25Z 3NS411B-F003 3150010-9698922S006 SMALL CX1250S/13 SL205S SMALL CONTROLLER PRE-300B-CE Gencobot Puma 260B 3155038-013D SGP-15B INR-244-646C 340 751031301H T1101-01-290-CR10704

C289 119

Used Used New New Used

04-21333, 0731415

LF-10A TV551 980010622A1 CX-1250S

RFDS 2000-2V Thermo-Con

Used 1690, 1523, 1791, Used 1799 C411 Used NS4110423 Used Used New 203588 Used SMC4033 Used 32140945 Used 032470623 Used SMC0339 Used PRE-6983 Used 2LA070037 Used 594530-01 Used 112985 Used 9B414704 Used Mo-0234(Jan.2008) Used Used S5-3766, S5-3765, Used S5-3743, S5-3728 CM05945-0704 L1302, L1323 Z06M-77661 TC2165A8, TC1997B4, TC8256A1, TC9987A1, TC3057A3 0704-10311 Used Used Used

LF-5 ServoStar CD

Daihen

DCP-208-24

8347 8349
Robot Exhaust Filter Lamp Power Supply Pump Interface Magnetron Head Network Terminal Power Supply

1 3(lot)

Brooks Leybold Osram Xantrex Ebara ASTeX CTI-Cryogenics Power-One
WTM-511-2-FWS02-V1-CU AF 40-65 750T3QIRAMAT XHR 7.5-80 A70W D13449 Network Terminal 1/2 PNL HCC15-3-AG

C07009550

Used Used New Used New Used Used Used

Cryopump Module

CTI-Cryogenics

8113160G001

On-Board P300 Module
B0505167, D0605897, E0505254, B0505154, E0505255, C0404498, E0706667 115330
Pirani Controller Servo Drive Position Controller Ion Pump Power Supply Robot Diaphragm Valve Pump PCB, Cass. Prime, A1 Bearing Assy. Concave Assy. Clamshell Drive Remote Plasma Cover Ring, AL Shield, Upper Robot & Controller RF Generator Turbopump Cont. LF RF Generator MDX DC Power Supply RF Generator PDX RF Generator Robot Turbopump Pendulum Valve Power Supply Power Supply DC Power Supply RF Generator Gearmotor RF Match RF Generator APEX RF Generator Turbopump Power Cable Pendulum Valve Turbopump Apex RF Generator Robot Controller MDX DC Power Supply Turbopump

SVG 90

Photo 250 DCR III
167458 1A448 H07__9304 N2, 100sccm
E500 E500 Eclipse 200mm Eclipse 200mm

NZY211443, 211444

18-023422 Endura

E33000021

Bearing and Drive MDX-10K Slave Nikon Scanner 200mm Nikon Optistation Stepper 200mm Stepper 200mm
W2501PH01 ENCOM1CN0 CP1EN1550 20061005-003-3M, 20061006-0043M 3152012-043Z 174315 TPS 4S007-479AN 2S014-038 859-8272-001 854-8301-007
000709435, 000683908 A941739 11649, 11714 400184
PCB, A1208 Digital Focus Microscope Head PCB, INX/300 Dual Board Assy PCB, DSC 7911 Digital Controller PCB, Preamp Assy PCB, Station Controller AS-568A O-Ring LES E-Chain Assy Exhuast Flow Controller PCB, MCR-ISA Encompass Controller Wafer Mapping Sensor PCB, Circuit Interface CNCV RPF FORM RPF PCB, TCCNT Sensor, CPL Sensor, CPL PCB, CASS/CASS, M3 PCB, A/D, TRANS PCB, MSTBOARD PCB, SCPU, M3 PCB, SCNT, M3 PCB, MIC-CNT Motor, Gear, Pulley, Drive Track, Ball/SW, ASY-IWS PCB, MCR, DRV CU, Cylinder, C40, Stroke 75, DA Unload Arm Cover Ring, TI SIPCU TXC, 2C, PM Consumables Kit Filter, Main, Interfrnc, B11 PCB, S/AF PCB, Multiple Sensor Motherboard PCB, DC Distribution MCE Mount PCB, Analog Process Control VDrive Lead Screw Assy PCB, GPI 6U PCB, Stepper1 Axiom BF Detector Harness MCR-CNT Board Chopper Drive PCB PC Interface Board PCB, PS Controller
ASML Nikon Nikon ASML Omron ASML Rite Track Eq Svcs Nikon Rite Track Eq Svcs Rite Track Eq Svcs Nikon Millipore Nikon Nikon Nikon Nikon Nikon Oerlikon USA, Inc. Oerlikon USA, Inc. Nikon ASML Nikon Nikon Nikon Nikon Rite Track Eq Svcs ASML Nikon Oerlikon Nederland B.V.Semiconductor IDL Eq. AMAT AMAT Nikon Nikon Rite Track Eq Svcs SVG CSF Technology Nikon Varian AMAT ASML SVG Nikon Parker Hine Design FSI Varian
ASML Stepper 200mm OST-3\3A LED-AF (Optistation) Metro 300mm Stepper 200mm
859-0743-KAB11310/201K 6810116041
Used Used Used Used Used Used Used Used Used Rebuilt Used Used Used Used New New Used New New Used Used Used Used Used Used New Used Used New Used Used New New Used Used Used Used Used Used Used Used Used Used Used Used Used Used
SVG860 - Proc Cntrl, 4/20MA, 100V 303-030 A5401A/B ASML Track 200mm Nikon P860 Scanner SVG860 SVG860 Metro 300mm SVG-860 - Photo 250 Encompass Controller Metro 300mm Optistation Nikon Scanner Nikon Scanner Optistation Unaxis 300mm Unaxis 300mm Optistation A5162, A5163 Optistation Optistation Optistation Optistation ASML Hard Bake Track CTI Electronics Corp - T10P9P9800 Optistation Unaxis 300mm ASML Stepper 200mm AMAT P860 CBS AMAT p860 ADH Nikon 860 Optistation SVG HardBake Track SVG PDPI TAZ Eclipse Optistation Kestrel AMAT 5000 SVGL860 - Hamamatsu PMT Det. HC125-04 Harness, Shtl, Echain, HBT Optistation 8598030003 99-80266-01 4G680-586AN 99-45762-15 99-66564-02 KAB11000/3301 ENCOM1CN0 KAB11310/201K 2S020-061 4G680-526AN 4G680-674AN 2S014-035-102084242 2S014-036-2S015-064-4 2S014-033-4 2S014-034-1 2S005-230 06-46437-2S003-8790135003 0021-18436 0242-19606 4G055-008-2AN 2S020-061 99-80271-01 99-80308-01 885-11-000 9700-4698-0100-99-48555-01 4S005-341-2 1396-017-03 778-2I 233-5002-00 E15002350

Toyota AMAT KLA-Tencor TEL KLA-Tencor Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Lam Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT Pressure Override Board
CleanTrack AC Power Box Laser Power Board Quad Microstepper PCB Dual DC Motor Board Dual DC Motor Board SMIF/Relay Board Opto Output Board Opto Input Board OnTrak Output Station OnTrak Spin Station OnTrak Brush Station OnTrak Input Station OnTrak Unload Mech. Arm OnTrak Spin Rinse Assembly OnTrak Brush Assembly OnTrak Chemical Delivery Assy OnTrak Wafer Indexer OnTrak Catch Cup BD Plan 20/0.4 210/0 BD Plan 10 0.25 210/0 BD PlanApo 150/0.9 210/0 BD PlanApo 40/0.80 210/0
T100L P5000 Mark II CRS1010 PB122-U300-02W 000327 28-8875-032 28-8875-013 28-8875-033 28-8875-038 28-8875-036 28-8875-037 10-8872-014 10-8882-027 12-8892-084
287947 287947, 2S700-583-1 2S700-598 2S700-582-1 2S700-581 2S700-580-1 2S700-555 9090-00239ITL 0090-93095ITL 9090-00100ITL 0090-91193ITL 9090-00101ITL 0090-91890ITL 0090-91927ITL 9090-00246ITL 9090-00104ITL 0240-75129 0290-7658* E/C LL 0100-7505 E/C LL 0100-7504 80-S09-UW 0100-94102ITL
Optistation 3 Optistation 3 Optistation 3 CCCNT MCR TCCNT SCNT SCPU MST XR80 XR80 XR80 XR80 XR80 XR80 XR80 XR80 XR80 Endura PVD Endura Orienter 8 Endura Orienter 8 Endura Orienter 8 Astex ETO MKS Rack
Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used
A-10100 A-10101 A-10102 A-1011 A-102 A-1020 A-103 A-1030a A-1030b A-104 A-1040 A-105 A-107 A-108 A-109 A-110 A-111 A-112 A-113 A-114 A-115 A-116 A-117 A-118 A-119 A-120 A-121 A-122 A-123 A-124 A-125 A-126 A-127 A-128 A-129 A-130 A-131 A-132 A-133
Metrology Tool Chamber Main Body AC Box Power Supply Board Parts System PCB, Gas HDP-CVD Chamber Orienter PCB, Pos Ultrasonic CAE Chamber Assy PCB, Pneumatic Chamber Assy Chamber Assy PCB, Interface PCB, Interface Cryopump PCB, Interface PCB, Control Board PCB, Control PCB, Relay Board Indexer Drive PCB, Gas Interface Computer RF High Voltage Source Chamber Source Assy Remote System Power Supply Board Vacuum Gauge Controller Wafer Load Arm Assy Interface Board DC Power Supply Power Supply Remote Control Box Wafer Aligner Assy PCB, Relay Board Temperature Monitor PCB, Control Board

4 3(lot) 1

Kokusai Kokusai NSK Panasonic Schumacher NSK Panasonic Panasonic Kokusai Kokusai Kokusai KLA-Tencor Kokusai Kokusai KLA-Tencor KLA Tencor Rorze TEL AMAT Kokusai Kokusai Kokusai Kokusai Cosel SMC SMC HiTek AMAT AMAT AMAT AMAT Varian Varian AMAT MRC TEL Varian AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT Astex AMAT
Vertron Brake PCB Vertron Kokusai Vertron Kokusai Vertron Absolute Bubbler Kokusai Vertron Kokusai Vertron Kokusai Vertron Kokusai Vertron Kokusai Vertron Kokusai Vertron CRS1010 TRT/OPT PCB Vertron Power Relay Box Vertron Power Module CX1103CH CRS1010 Solenoid PCB 200mm ACT12 Centura 5200 Vertron Vertron Vertron Vertron ACT 8 - Thermo-Con ACT 8 - Thermo-Con XR80 Quantum Leap III Quantum Leap III Quantum Leap III Quantum Leap III E1000 200mm E1000 End Station Centura 5200 Eclipse E1000 End Station Wheel XR80 XR80 XR80 XR80 Centura 5200 Centura 5200 Centura 5200 Centura 5200 Centura 5200 Centura 5200 Centura 5200 Centura 5200 AMAT Centura 5200 Centura 5200
D3E01299A CX1209 EMB014CF1-05 ADKB400BPFADA ATCS-15 TLCHFCK EMLZ10CF1-05 ADKB100BPFADA ADKB400BPFADH CX-2000 CX-2000 001009T T1DD1-52447 T2DD1-001009 RE120-002-001 2980-415508-W1 KBC CPU9 SIOB DIOA PLMDRV4 K25A-12, K100A-24, MMC100U-2 INR-244-217B INR-244-216U 0090-91917 0030-90107 0020-99685 E1000 0010-35004 A120024 0090-91229 0090-91419 9090-00093 0100-90773 0100-90790 0010-18129 0035-18000 0010-18130 0040-18213 0100-35124 0010-75533 718-736 3155031-039A D13449 0010-20480

CX1103 CX1103C

D1E01291

AG9131A Rev Q

A-407 A-408 A-409 A-410 A-411 A-412 A-413 A-414 A-415 A-416 A-420 A-421 CON-003 CON-004 CON-005 CON-006 CON-007 CON-008 CON-013 CON-014 CON-015 CON-018 CON-019 CON-020 CON-028 CON-035 CON-038 CON-042 CON-049 CON-051 CON-058 CON-064 CON-067 CON-073 CON-093 CON-094 CON-095 CON-105 CON-106 CON-109 CON-112 CON-119 CON-120 CON-121 CON-126 CON-127 CON-132 CON-138 CON-141 CON-143
PCB, Wafer Arm Interlock Board HDP Right Cassette Handler Conditioning Oven PCB, Wafer Arm Gripper Interface PCB, Wafer Arm Position Board PCB, Analog Sync Detect Board Source Conditioning Box CVD RPSC Applicator HDP CVD Upper Chamber Slit Valve Measurement System CVD Tool Regulated Power Supply Regulated Power Supply Regulated Power Supply Regulated Power Supply Regulated Power Supply Regulated Power Supply Switching Power Supply HiVolt Power Supply HiVolt Power Supply Vacuum Interface Module Vacuum Interface Module Vacuum Interface Module Pump Skins Gap Assembly Lamp Spot Cure Unit Lamp Source and Power Supply Wafer Measurement Unit Gear Motor Wafer Sorter Scanner "A" Convection Tube Interface Device Monochromator Heater Chuck Wafer Prealigner Wafer Indexer Switching Power Supply Fluid Sensor Heater Tape Line Controller Turbopump Controller Film Stress Machine Motor Control Gap Assembly Gap Assembly Gap Assembly Silicon Graphite Electrode RF Match Source RPSC Applicator Vacuum Pump Wafer Mounter Turbopump Controller

Saes Getters Saes Getters Nupro D-Link Bay Networks Dayton SMC Veriflo Veriflo Bepperl Fuchs Bepperl Fuchs Bepperl Fuchs Parker Veriflo Carl Zeiss Unitron Omega SensArray Kensington Labs Nupro MKS Sanyo Denki MDC Nor-Cal Nor-Cal Nor-Cal Nor-Cal Nor-Cal Seiko Leybold Coolvac Millipore Fuji Seiki Fuji Seiki Vishay-Dale Draloric MKS MKS Carten Duplex Oriental Motor CTI Nor-Cal Proteus Industries Leica Leitz Wetzlar
SHC504M90404-7 UHP504C606-10 6L-LD8-5457 DE-816TP 800 1" Bore Ball Bearing Pillow Block 4X726 Pneumatic Valve Stack High Pressure Valve High Pressure K-Series No. 70979 Solenoid Driver Solenoid Driver K-Series Solenoid Driver Epiplan-HD 8/0.2 160/- Thermocouple Input Type K Process Probe Track Robot Z-Axis Cable Baratron Pressure Transducer 1" HV Series Inline Stainless Isolation Stainless Isolation Stainless Isolation Stainless Isolation Stainless Isolation Valve Valve Valve Valve Valve Valve 944MSFS8FFLK 917A0PLPNC/NCS6598 KHD4-IVR / Ex 118 KFD2-SD KHD3-ISD QC2 6A-PR5-EPRT-SS-2801 69-M40/0.OM5-ITC-R-C Series 1501 N74018 6L-LDA-1B1PX-K Type 750B11 PMDPA1C3P050127-22 050127-23 050127-24 050127-25 050127-21
Used Used New Used Used New New New New Used Used Used New Used Used Used New New New Used Used Used Used Used Used Used Used Used New New Used Used New New Used New
Turbomolecular Pump Control Unit STC-L SC System Wafergard Butterfly Butterfly Controller In-Line Gas Filter Pneumatic Valve Pneumatic Valve 844230 WGFG06WC1 BV-4AX0-HF BV-4AX0-HF PE100 300pf R 42 852B DMA-23163 DeviceNet

150188

Ceramic Transmitting Capacitor Baratron Pressure Transducer i-Baratron Digital Manometer DPV Gearhead Parallel Shaft 9:1 80K Condensing Array Inlet Plate Stainless Isolation Valve Flow Meter PL-FLUOTAR 20x/0.45 D PL FLUOTAR 5x/0.12

5GN9KA GN

New New
050127-Series 768009 567008

New New Used Used

CSP-410 CSP-414 CSP-415 CSP-416 CSP-420 CSP-423 CSP-424 CSP-430 CSP-436 CSP-437 a, b CSP-440 CSP-441 CSP-444 CSP-454 CSP-455 a, b CSP-456 CSP-457 CSP-459 CSP-461 CSP-463 CSP-467 CSP-472 CSP-473 CSP-474 CSP-477 CSP-478 CSP-479 CSP-480 CSP-481 CSP-483 CSP-484 CSP-485 CSP-486 CSP-489 CSP-490 CSP-491 CSP-492 CSP-494 CSP-495 CSP-497 CSP-498 CSP-499 CSP-500
Objective Isolation Valve Sensor Cable Valve Set Valve Tube Vacuum Controller Valve Controller Controller Motor Driver Vacuum Controller Temperature Controller Temperature Controller Signal Conditioner Signal Conditioner Valve Valve Objective Zoom Lens Valve Cable Temperature Controller Temperature Controller Lens Valve Zoom Lens Software Servo Drive Servo Drive Servo Drive Temperature Controller Beam Splitter Gauge Gauge Temperature Controller Unkown Temperature Controller Power Supply Power Supply Computer Computer
Leitz Wetzlar Edwards SUNX TRK SMC Carten Signet Edwards Fujikin Kokusai Unknown VEXTA Stepping Motor Driver 5Phase BOC Edwards Kokusai Kokusai MKS MKS Fujikin Kokusai

PL FLUOTAR 3.2x/0.06 Isolation Valve for LAM 9600

569161 PV40PKS-LAM

Used Used Used Used New New New Used New Used 64110040 Used New
Area Sensor Emitter and Reciever NA2-20D & NA2-20P Robot Z-Axis Control Cable AMP 35-5008-1013-00 Pneumatic 14 Valve Set 10-VZ110 High Purity Open/Close Valve 250 V80590 PSI Ionization Gauge 1" Glass Tube 501 Pirani Vacuum Controller High Purity Vent Valve Overheat Protector Torch Controller 37-5319 D39511000 FP-UDDF-71-9.52-NL DN-130 P CX1304A
Accuron Accuron Signal Conditioner 10 TORR Signal Conditioner 10 TORR High Purity Gas Valve Kuroda Oil Free Solenoid Valve
Model 1570 CQ-1500A CQ-1400A Type 221 Type 221 FPR-71-9.25
Used Used Used Refurbished Refurbished New New Used
Vickers Instruments Objective 1/2 Inch Bayonet Mount Bayonet Leitz Leica Zoom HVA Gate Valves Uknown Watlow Watlow Schneider Componar-S Lens Kreuznach Minolta MiniCom Sanyo Denki Sanyo Denki Sanyo Denki Watlow Hewlett-Packard Ametek Ametek Watlow Edwards Uknown Uknown Power One HP HP 200mm Zoom Lens PC Parts, Software
541038 0224-42191W 93BB-1CD1-00BR 935A
Used Used Used New New Used Used New New Used Used Used New Used New New New Used New Used Used Used Used

Din-A-Mite Beam Splitter

PV1A015SM61P50 PV1A015SM61P50 Unkown 5704-2 IPS-24SGFT1 EIPS-24SGFT1 L93AB-1CD1-00RR HIT02

HE24-7.2-A

CSP-501 CSP-502 CSP-503 CSP-504 CSP-506 CSP-507 CSP-509 CSP-510 CSP-512 CSP-514 CSP-516 CSP-517 CSP-519 CSP-520 CSP-521 CSP-522 CSP-523 CSP-524 CSP-525 CSP-526 CSP-528 CSP-531 CSP-532 CSP-533 CSP-534 CSP-535 CSP-542 CSP-543 CSP-545 CSP-549 CSP-550 CSP-552 CSP-553 CSP-555 CSP-556 CSP-557 CSP-558 CSP-559 CSP-563 CSP-564 CSP-566 CSP-568 CSP-570
Servo Drive Servo Drive Servo Drive Baratron Sensor Pneumatic Valve Flash Module Temperature Controller Motor Driver Camera Module Power Supply Interface Circuit Breaker Circuit Breaker Circuit Breaker Circuit Breaker Circuit Breaker Circuit Breaker Servo Drive Servo Drive Temperature Controller Input Aperture Lens Valve Laser Objective Pneumatic Valve Pneumatic Valve Pneumatic Valve Power Supply Baratron Camera Module Valve Valve Valve Valve Valve Display Module Thermocouple Light Curtain Light Curtain Test Procedure System Light Curtain Controller Baratron
Panasonic Panasonic Yaskawa Baratron Precise Sensors Inc. SMC BOC Edwards Watlow Vexta Sony Pacific Scientific Digitron Cutler-Hammer Cutler-Hammer Cutler-Hammer Cutler-Hammer Cutler-Hammer Cutler-Hammer Yaskawa Yaskawa Watlow NM Laser Products New Focus Clippard Melles Griot Leica SMC SMC SMC Mimir MKS Uknown Festo Festo Festo Festo Festo MKS Omega STI STI STI MKS

S3-85134-^A TMP 280-L TMP 2001-LME CH-400AHS-M0-ModelFH 853-250589R001 3150275-007G 7621993020 L 3200 LPG12A-21051-50 17244-UE14-AAC1 no label LPG12A-21051-50 12044-PA44-0003 OEM-12AL-01 OEM-12AL-01 LPG-6AL OEM-6B-3150048-004B 853-033887-001 LP-2000-400K 716-051057-001 810-004615-715-028289-001 ATL-100 718-094075-002 853-073087-600-A-262 CPMX-3000

179706, 202324

New New New New Rebuilt Used

RFPP LPG-12A

A3T-667, A3T-657 Used 218 New Used New Used Used New Used Used Used Used Used Used Used Used New New Used Rebuilt Used New Used Used
LPG-12A OEM-12A OEM-12A OEM-6B

LP-2000

9231B0437, 9231B0414

90-03-404

IL-044 IL-045 IL-047 IL-049 IL-050 IL-051 IL-052 IL-053 IL-054 IL-055 IL-056 IL-057 IL-058 IL-059 IL-060 IL-061 IL-062 IL-063 IL-064 IL-065 IL-066 IL-067 IL-068 IL-069 IL-070 IL-071 IL-072 IL-074 IL-076 IL-077 IL-078 IL-079 IL-080 IL-081 IL-082
DC Power Supply RF Tuner RF Generator Chiller Lower Electrode Match Box Robot Motor Robot Quartz Shield CRT-Keypan Chassis Match Box Motorized Valve Wafer Lifter Ceramic Ring Aperture Ring PCB, Gas Interface PCB, Micro CVD Control Driver Assy PCB, Power Supply Board PCB, Power Distribution PCB, CPU Board PCB, Process Controller PCB, Heartbeat Board PCB, ADIO 9800 PCB, Power Supply PCB, Temp Cont. Interface PCB, Interface Board Control Panel RBM AC Distribution Box Transfer Arm, Single Transfer Arm, Double Transfer Arm, Fork RF Coil W/Plate PCB, CAM Sensor Board MFC

1 5(Lots of 2) 1

AE Daihen ENI Neslab LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM LAM
ASM LDM Plasma DC Power Supply OEM-12A HX-75 RFRB ASSY, LWR ELCTD MTCHBX 950
3152026-000D DAUMA-10SA OEM-12AL-01 3.86105E+11 853-440656R001 5357
Used Used Used Used Refurbished Refurbished New New Refurbished Refurbished Used Refurbished Refurbished New Used New New New New New New New New New New New New New New New New New Used New Refurbished
Brooks Robot Mtr-5 - 001-9010-01 9508-0139 Brooks Robot - 001-1951-05018 SHIELD, QUARTZ QUAD EP 799-550206-001 716-052017-001 852-017500R001 853-015001R003 853-055030-001 853-051252R001 716-28033-1 716-072165-002 118130-009 118730-001 853-190023-001 810-017075-003 ZT 5510E-C7R5S1V810-17033-003 1000-0050 810-17012-001 810-057023-002 40-0075-002 1000-0041 00778-701 718-061278-001 1B02737G01 1B02735G01
Universal Gas Interface Board Tylan Mirco CVD Control Bd
ZiaTech ZT5510 Matrix Integrated Systems
Matrix Integrated Systems Hine Design Accufiber Control Panel RBM, AC DIST ENCL. Cutler-Hammer LBPM

121199900

Mod 38A Millipore/Tylan 4900 Series

ICS AMAT AMAT Leybold Brooks Particle Measuring System Yaskawa Rorze Glassman Equipe PRI Genmark Allen-Bradley Equipe PRI Genmark Edwards Edwards Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Nikon Sumitomo Electric Industries, Ltd. Nikon Nikon Yaskawa Nikon Nikon Nikon Nikon Yaskawa Yaskawa Power One AMAT AMAT
XR80 XR80 UL 100 Plus FiberVac
7315-A3-01 0020-99685 0020-38 ABM407B-1-S-CE-S293 SRC-II006 CURR-3265-1 PS/KL030N100YU6 ABM-407B-1-S-CE-S293 Gencobot 4/3L SLC 500 ABM-407B-1-S-CE-S293 S08P4.RD QMB1200 GVI 100P Z-X4P/12-A0702C Z-X4P/12-A0702C
D931200069 6-0002-0652-SP

30kV Gencobot

9900106831 01-52161
NSR Series NSR Series NSR Series NSR Series AF-I/F-CTLX24 FIAAF Process SR8-XY2 RTEXX3 IU-X2A RL-LIBHT2 WL3MOT5 Linear Pulsemotor Controller WL3SEN4 WL3MTR-H6 ALGAF-P/D-X4+ ALGAF-P/A-X4+ alg-Z8277 AVIS-I/F2 LC-PRES2B X2A-STGA/D X4-AIS ADE1 H Control Unit SPA431B SPA236A XU-DL1910 X32D1-0001 SPA432B SPA432A CLSR-0420-N2CD CLSR-4590-N2CG daq MKII type H daq MKII type H
4S080-677-5 4S007-865-C A-552 4S018-650 4S007-900-IK 4S018-679 4S007-953-A 4S014-160A 4S018-567-A 4S018-531-1 4S008-115-A 4S008-114 4S008-049-D A-552 4S007-787-1 4S080-627 4S007-902-1 4S008-052-C A-554 4S587-245-2 4S587-241 4S586-947-2 4S587-288 027H0153 4S587-171-1 4S586-950-4 4S586-949-4 4S587-668 4S587-666 MAP110-4200C 0090-90967 9090-00314
Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used Used

Rev A Rev A

K-584 K-585 K-587 K-588 K-589 K-590 K-591 K-592 K-593 K-594 K-595 K-596 M-7 M-8 MILLI-05 MILLI-16 MILLI-17 MILLI-20 MILLI-21 MILLI-22 MILLI-23 MILLI-24 MILLI-25 MKS-088 MKS-095 MKS-096 MKS-097 MKS-099 OT-001 OT-002 OT-018 OT-060 S-016 S-018 S-027 S-028 S-029 S-030 S-031 S-033 S-034 S-035 S-036 S-037 S-038 S-039 S-040 S-041 S-042 S-055 S-056
Power Supply Proximity Sensor Amplifiers Contacter Drive Power Supply SDS Gas Interlock HP Gas Interlock Gas & Temp Motherboard Set Media Converter & Tranceiver DCDLINK Support Gas Panel Power Supply High Voltage Control Unit High Voltage Cylinder Chamber Assy Angle Valve MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC MFC